Apex Mass Flow Controllers Aggressive Gases 0.5 sccm – 5000 slpm


Gas for Calibration – Flow Measurement: Please specify in note to seller.

Setpoint Input-Output Communications:  0-5V

Connectors for Cable:  8-pin Din


**For more customizable options, visit our Apex Systems Configuration Builder**


Flow Rate-  Full scale flow rate of the mass flow meter. Turndown ration is 200:1

Calibration Gas – Gas used for factory calibration. There are 30 on-board gases on each mass flow controller that can be chosen as the gas measured. The unit is in calibration for any of the gases in the library. 

Output – Output of the mass flow controller is in the form of 0-5V, 0-10V or 4-20 mAmps. Every Apex device has RS-232 capability and does not need to be specified.

Vacuum- Is the mass flow controller flowing into a vacuum pressure?


*For more customizable options, visit our Apex Systems Configuration Builder**


The Apex Aggressive Gas Mass Flow Controller provides flow control of some of the harshest gas applications. Gases include ammonia, butylene, chlorine, dimeth ylether, hydrogen sulfide, silane and others. The Aggressive Gas Series uses alternative seals compatible with these and other aggressive/corrosive gases that normally are problematic with the standard Viton seals. Each Aggressive Gas Apex MFC does come with all inert and other gases in the library. Output connectors can be the standard NPT or welded VCR.

A 115V/60Hz power cable(PVPS24U) is available to power the unit.

For the end user, flows can be read and the controller set via the on-board display. FlowVision Software can be purchased for using a computer to record and graph the flows. The gas selection can also be made from the computer.

For use with a system, a 6 ft. cable(DC-61) or a 25 ft. cable(DC-251) can be purchased in the communication cable section. One end is the 9 pin Din connector to connect to the Apex MFC, while the other end are blank wires.

Additional information

Flow Rate

0.5 sccm Full Scale, 1.0 sccm Full Scale, 2 sccm Full Scale, 5 sccm Full Scale, 10 sccm Full Scale, 20 sccm Full Scale, 50 sccm Full Scale, 100 sccm Full Scale, 200 sccm Full Scale, 500 sccm Full Scale, 1 slpm Full Scale, 2 slpm Full Scale, 5 slpm Full Scale, 10 slpm Full Scale, 20 slpm Full Scale, 50 slpm Full Scale, 100 slpm Full Scale, 500 slpm Full Scale, 1000 slpm Full Scale, 1500 slpm Full Scale, 2000 slpm Full Scale, 3000 slpm Full Scale, 5000 slpm Full Scale

Calibration Gas

Ammonia, Butylene (1-Butene), Cis-Butene, Iso-Butene, Trans-Butene, Chlorine, Dimethylether, Hydrogen Sulfide, Nitrogen Trifluoride, Nitric Oxide, Propylene, Silane, Sulfur Dioxide, Air, Nitrogen, Oxygen, Acetylene (C2H2), Air, Argon (Ar), i-Butane (i-C4H10), • n-Butane (n-C4H10), Carbon dioxide (CO2), Carbon monoxide (CO), Deuterium (D2), Ethane (C2H6), Ethylene/Ethene (C2H4), Helium (He), Hydrogen (H2), Krypton (Kr), Methane (CH4), Neon (Ne), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Xenon (Xe)

Input/ Output Signal

0-5V, 0-10V, 4-20mAmp

Totalizer Option

Yes, No

Flowing into Vacuum?

No, Yes

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