Apex Vacuum

Apex Products

APEX Mass Flow Controllers, Meters, and Pressure Controllers

Mass Flow Controllers, Mass Flow Meters, Pressure Controllers, and Water Flow Meters and Controllers

Apex Mass Flow Controllers and Mass Flow Meters for vacuum and pressure applications combine flexibility with fantastic accuracy. Flexibility to choose from 30 on-board gases, to choose your input and output voltage and the ability to use RS232 communications provide great flexibility for both end user and system applications. The ability to control up to 26 Apex devices through one RS232 port with the BB9 Communications Box, provides your communications set-up the ultimate in flexibility.

Advantages of Apex Gas and Water Flow Devices

  • Flow up to 130 different gases with 1 Apex Flow Controller or Apex Flow Meter
  • Pinpoint Flow Accuracy
  • Control up to 26 Apex devices with one Computer or PLC
  • Ultra-Fast Response Time
  • No Warm-up Time Needed for Start-up
  • Flow Range from 0.5 sccm to 1500 slpm Full-Scale
  • Low Cost but High Tech
  • Apex Mass Flow Controllers and Mass Flow Meters are in use all over the world in both Research, Analytical and Industrial Applications. Both OEM equipment builders and some of the worlds finest researchers can take advantage of the Apex Vacuum Mass Flow Controllers benefits and low price.

Applications:

Vacuum Evaporation
Vacuum Sputtering
Ion-beam Deposition
Thin Film Coatings
High Temperature Furnace Gas Control
E-Beam Coating Systems
Hydrogen Fuel Cell Research
University Research
Gas Mixing

Mass Flow Controller

Apex Mass Flow Controllers for vacuum and non-vacuum applications combine flexibility with great accuracy. Our mass flow controllers are multi-gas capable with a flexibility to choose from a list of 98 on-board gases. Ranges from 0.5 scam to 2000 slpm.

Mass Flow Meters

Apex Mass Flow Meters for vacuum and non-vacuum applications combine flexibility with great accuracy. Flexibility to choose from a list of 30 on-board gases, to choose your input and output voltage and the ability to use RS232 communications. Flow Ranges from 0.5 scam to 2000 slpm.

Battery Powered Portable Flowmeter

Some installations require a portable solution for measuring flow or to verify an instruments flow rate. Powered by a standard 9V battery, the Apex Battery Powered Mass Flow Meter is an economical choice.

High Pressure Pressure Controller and Vacuum Pressure Controller to 4 torr

The 26,000 torr to 760 torr Apex Pressure Controllers are used in a variety of applications where high pressures need to be achieved and maintained. These controller can be partnered with 1 to 27 other Apex Controllers and Meters to control the amount, speed, and type of gas along with the pressure.

Dual Valve Pressure Controller 760 torr to 8 torr

In a dual valve pressure controller on side can the connected the vacuum pump with other side to atmosphere or a inert gas source such as nitrogen. Sensing port is connected to the vacuum vessel.

Apex Pressure Controller for Vacuum Pressures in the Millitorr Range

The Apex Vacuum Pressure Controller for the millitorr range uses a capacitance diaphragm gauge as the sensor reading pressure. This linear output gauge sends an analog or digital signal to the Apex Pressure Controller for precise gas control to the vacuum system.

Water Flow Controllers and Meters

Apex presents its Liquid Flow Control for accurate and fast control and measurement for distilled and de-ionized water.

Leak Detection

The Apex Flow Leak Detector for leak determination on closed volumes.