Apex Mass Flow Controllers 0.5sccm – 5000slpm


Apex Mass Flow Controllers for pressure and vacuum applications. These highly accurate mass flow controllers for inert and other non-corrosive applications can be customized with a number of options. Other options can purchased by calling us at 800-215-1438.

Flow Rate-  Full scale flow rate of the mass flow controller. Turndown ration is 200:1

Calibration Gas – Gas used for factory calibration. There are 30 on-board gases on each mass flow controller that can be chosen as the gas measured. The unit is in calibration for any of the gases in the library.

Input/Output – Input/Output of the mass flow controller is in the form of 0-5V, 0-10V or 4-20 mAmps. Every Apex device has RS-232 capability and does not need to be specified.

Totalizer- Gas Flow Totalizer can be specified as a yes/no option

Vacuum- Is the mass flow controller flowing into a vacuum pressure?



**For more customizable options, visit our Apex Systems Configuration Builder**


Our Apex Mass Flow Controller is standard for most applications either vacuum or pressure. At Apex, we offer for the price the most accurate and also fastest MFC on the market. Options available to customize your mass flow controller for your specific application. You can add features/options such as high calibration, totalizer function,  and custom VCR gas fittings in our custom builder. Our on-board controller allows you to set our MFC without expensive rack mount control boxes. Using our PID parameters, you can further customize the speed and update times to better meet your application needs.

A 115V/60Hz power cable(PVPS24U) is available to power the unit.

For the end user, flows can be read and the controller set via the on-board display. FlowVision Software can be purchased for using a computer to record and graph the flows. The gas selection can also be made from the computer.

For use with a system, a 6 ft. cable(DC-61) or a 25 ft. cable(DC-251) can be purchased in the communication cable section. One end is the 9 pin Din connector to connect to the Apex MFC, while the other end are blank wires.

Additional information

Flow Rate

0.5 sccm Full Scale, 1.0 sccm Full Scale, 2.0 sccm Full Scale, 5 sccm Full Scale, 10 sccm Full Scale, 20 sccm Full Scale, 50 sccm Full Scale, 100 sccm Full Scale, 200 sccm Full Scale, 500 sccm Full Scale, 1 slpm Full Scale, 2 slpm Full Scale, 5 slpm Full Scale, 10 slpm Full Scale, 20 slpm Full Scale, 50 slpm Full Scale, 100 slpm Full Scale, 500 slpm Full Scale, 1000 slpm Full Scale, 1500 slpm Full Scale, 2000 slpm Full Scale, 3000 slpm Full Scale, 5000 slpm Full Scale

Calibration Gas

Air, Nitrogen, Oxygen, Acetylene (C2H2), Air, Argon (Ar), i-Butane (i-C4H10), • n-Butane (n-C4H10), Carbon dioxide (CO2), Carbon monoxide (CO), Deuterium (D2), Ethane (C2H6), Ethylene/Ethene (C2H4), Helium (He), Hydrogen (H2), Krypton (Kr), Methane (CH4), Neon (Ne), Nitrous Oxide (N2O), Propane (C3H8), Sulfur Hexafluoride (SF6), Xenon (Xe)

Input/Output Signal

0-5V, 0-10V, 4-20mAmp

Totalizer Option

Yes, No

Flowing into Vacuum?

No, Yes

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