Apex Vacuum

Mass Flow Control Aggressive or Corrosive Gas

Mass Flow Controllers for Aggressive or Corrosive Gases

High Vacuum and Pressure Applications

Can Your Mass Flow Controller Control Many Different Gases Both Inert and Aggressive? We Can!

Apex Mass Flow Controller Aggressive Gas series for vacuum and pressure applications combine flexibility with great accuracy. Our mass flow controllers are multi-gas capable with an on-board library of both inert and aggressive gases.We offer a flexibility to choose from a list  of on-board gases. You choose your input and output voltage along with the ability to use RS232 data communications. Using the optional BB9-USB Communications Box our Apex Mass Flow Controllers can  control up to 27 Apex devices through one RS232 port, providing your set-up the ultimate in flexibility.

What Makes us Different?

  • 98 On-Board Interchangeable Gases
  • Addressable RS-232 Digital Control Capability
  • FlowVision Computer Control/GraphingSsoftware
  • Pinpoint Accuracy of 0.2% Full Scale plus 0.8% Direct Reading
  • High Accuracy Calibration Option 0.4% FS plus 0.4% Reading
  • 200 to 1 Turndown Ration from Full Scale Flow
  • Flow Ranges from 2000 SLPM to 0.5 SCCM
  • For end users, no power supply/display boxes needed
  • RS-232 with software available
  • High Tech, Low Cost

Options for Apex Mass Flow Controllers

  • TFT Display (shown above) for low light conditions
  • High Accuracy Calibration available
  • Remote Display Options
  • ATEX designs available on request
  • Secondary outputs available
  • 4-20 mAmp control available


  • Vacuum Evaporation Coating
  • Vacuum Sputtering
  • Ion-Beam Deposition
  • E-Beam Coating Systems
  • Gas Mixing
  • High Temperature Furnace Gas Control
  • Membrane Testing
  • Fuel Cell Research
  • Environmental Air Sampling
  • Research Applications