Apex Vacuum

Apex Mass Flow Controllers-Vacuum MFC Semi Compliant


Gas for Calibration – Flow Measurement: Please specify in note to seller.

Setpoint Input-Output Communications:  0-5V

Connectors for Cable:  8-pin Din


**For more customizable options, visit our Apex Systems Configuration Builder**


Flow Rate-  Full scale flow rate of the mass flow meter. Turndown ration is 200:1

Calibration Gas – Gas used for factory calibration. There are 30 on-board gases on each mass flow controller that can be chosen as the gas measured. The unit is in calibration for any of the gases in the library. Using The Apex System Configuration Builder, you can specify for primary gas calibration.

Output – Output of the mass flow controller is in the form of 0-5V. Using The Apex System Configuration Builder, you can customize output to 0-5V, 0-10V or 4-20 mAmps. Every Apex device has RS-232 capability and does not need to be specified.



For more customizable options, visit our Apex Systems Configuration Builder**


Our Apex Mass Flow Controller for vacuum applications can be used in new systems or for replacing older mass flow controllers.  Replace existing thermal mass flow controllers as ours is comparable form, fit and function.  The enclosed valve design and fittings conforms to SEMI International Standards. Gas connections are VCR.

A 115V/60Hz power cable(PVPS24U) is available to power the unit.

For the end user, flows can be read and the controller set via the on-board display. FlowVision Software can be purchased for using a computer to record and graph the flows. The gas selection can also be made from the computer.

For use with a system, a 6 ft. cable(DC-61) or a 25 ft. cable(DC-251) can be purchased in the communication cable section. One end is the 9 pin Din connector to connect to the Apex MFC, while the other end are blank wires.

Additional information

Flow Rate

0.5 sccm Full Scale, 1.0 sccm Full Scale, 2 sccm Full Scale, 5 sccm Full Scale, 10 sccm Full Scale, 20 sccm Full Scale, 50 sccm Full Scale, 100 sccm Full Scale, 200 sccm Full Scale, 500 sccm Full Scale, 1 slpm Full Scale, 2 slpm Full Scale, 5 slpm Full Scale, 10 slpm Full Scale, 20 slpm Full Scale

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