For more customizable options, visit our Apex Systems Configuration Builder**
Our Apex Mass Flow Controller for vacuum applications can be used in new systems or for replacing older mass flow controllers. Replace existing thermal mass flow controllers as ours is comparable form, fit and function. The enclosed valve design and fittings conforms to SEMI International Standards. Gas connections are VCR.
A 115V/60Hz power cable(PVPS24U) is available to power the unit.
For the end user, flows can be read and the controller set via the on-board display. FlowVision Software can be purchased for using a computer to record and graph the flows. The gas selection can also be made from the computer.
For use with a system, a 6 ft. cable(DC-61) or a 25 ft. cable(DC-251) can be purchased in the communication cable section. One end is the 9 pin Din connector to connect to the Apex MFC, while the other end are blank wires.