Diffusion Pump Heaters
Replacement diffusion pump heaters for all major manufacturers. Diff-Therm Platen Heaters provide 20% more heat than OEM heaters. Flat, smooth platen surface assures uniform, efficient heat transfer. DIP performance provides process improvements with higher throughput. Our one piece design (instead of the 3 piece OEM design) provides easier and faster installation.
Pump Heater Brands/Types of Heaters
Varian or Agilent - Diff-Therm Platen Heaters
Edwards Vacuum - Diff-Therm Platen Heaters
Leybold Vacuum- Watt-Flex Cartridge Heaters
CVC - Diff-Therm Platen Heaters
Veeco - Diff-Therm Platen Heaters
Cooke Vacuum - Diff-Therm Platen Heaters
Diff-Therm Accessories
High-Temperature Manganese Nickel Conductor Wire (1000°F Max)- Recommended as lead wires for connections to header terminals for high-temperature areas. Use with ceramic bead insulators below.
Ceramic Bead Insulators- Can Withstand temperatures to 2000°F
High-Temperature Nickel Ring Terminals (Stak-On type)- Good for connections in high-temperature areas.
Diff-Tranz High-Temperature Heat Transfer Compound for Temperatures to 1250°F (675°C) - A good idea for use with Ring heaters. Also good for mounting Platen heaters when contact between the heater and pump boiler plate is poor. Not recommended for cartridge heaters.
High-Temperature (850°F/450°C max) Insulated "A" Nickel Conductor Wire
DIP Heater Selection/Quote Request
One-Piece Assembly Simplifies Installation
Our platen heaters are one piece instead of 3 pieces (conventional tubular/crush plate design). Alignment and fit is never an issue
Watt-Flex® Cartridge Heaters
Watt-Flex® Cartridge Heaters are direct replacements for Leybold Vacuum Diffusion Pump Heaters.
The split sheath heater of the Watt-Flex is easily inserted into the heater tube at the base of the Leybold pump and can be provided with or without the mounting bracket used to secure the heater in place. When energized, the heater legs expand to make snug contact with the bore for maximum heat transfer. When de-energized, the heater contracts for easy removal. This eliminates the chance of having to drill out the heater, saving time and energy.
Diffusion Pump Selection Guide by Pump Model
| Heater Replacement Guide: VARIAN / NRC | |||||||
|
PUMP |
PUMP |
Heaters |
Electrical Rating |
VARIAN/NRC |
DALTON |
HEATER |
|
|
WATTS |
VOLTS |
||||||
|
2" |
HSA |
1 |
350W |
120V |
0181-6473-01-100 |
W5C030-0117 |
CARTR. |
|
2" |
HS-2 |
1 |
450W |
120V |
0181-6473-02-125 |
W5C033-0118 |
CARTR. |
|
2" |
M-2 |
1 |
450W |
120V |
0181-6472-03-120 |
4/512-2/9D |
PLATEN |
|
4" |
H4X, |
1 |
1450W |
120V |
0181-6473-04-205 |
1512-4/9D |
PLATEN |
|
4" |
H4X, |
1 |
1450W |
208V |
0181-6473-210 |
1521-4/9D |
PLATEN |
|
4" |
H4X, |
1 |
1450W |
240V |
0181-6473-04-250 |
1524-4/9D |
PLATEN |
|
4" |
M-4, |
1 |
1190W |
120 |
0181-6473-04-100 |
1212-4/9D |
PLATEN |
|
4" |
M-4, |
1 |
1190W |
240 |
0181-6473-04-200 |
1224-4/9D |
PLATEN |
|
4" |
VARIOUS |
1 |
AS REQUIRED |
-- |
CUSTOM 4/9D |
PLATEN |
|
|
4" |
HS4/0161 |
1 |
1000W |
120V |
0181-6473-04-004 |
1012-5/D |
PLATEN |
|
4" |
VARIOUS |
1 |
AS REQUIRED |
-- |
CUSTOM 5D |
PLATEN |
|
|
6" |
VHS-6, |
1 |
2200W |
120V |
0181-6473-06-125 |
2212-6D |
PLATEN |
|
6" |
VHS-6, |
1 |
2200W |
208V |
0181-6473-06-175 |
2221-6D |
PLATEN |
|
6" |
VHS-6, |
1 |
2200W |
240V |
0181-6473-06-225 |
2224-6D |
PLATEN |
|
6" |
VHS-6, |
1 |
2200W |
480V |
NOT LISTED |
2248-6D |
PLATEN |
|
6" |
M-6, |
1 |
1785W |
120V |
0181-6473-06-100 |
1812-6D |
PLATEN |
|
6" |
M-6, |
1 |
1500W |
208V |
0181-6473-06-150 |
1521-6D |
PLATEN |
|
6" |
M-6, |
1 |
1785W |
240V |
0181-6473-06-200 |
1824-6D |
PLATEN |
|
6" |
VARIOUS |
1 |
AS REQUIRED |
CUSTOM 6D |
PLATEN |
||
|
6" |
HS6/0162 |
1 |
1800W |
120V |
0181-6473-01-005 |
1812-7D |
PLATEN |
|
6" |
HS6/0162 |
1 |
1800W |
240V |
0181-6473-01-006 |
1824-7D |
PLATEN |
|
6" |
VARIOUS |
1 |
AS REQUIRED |
CUSTOM 7D |
PLATEN |
||
|
10" |
HS-10 |
1 |
3900W |
208V |
NOT LISTED |
3921-11D |
PLATEN |
|
10" |
HS-10 |
1 |
3900W |
240V |
NOT LISTED |
3924-11D |
PLATEN |
|
10" |
HS-10 |
1 |
3900W |
480V |
NOT LISTED |
3948-11D |
PLATEN |
|
10" |
HS-10 |
1 |
3300W |
480V |
0180-6473-10-230 |
3348-11D |
PLATEN |
|
10" |
VARIOUS |
1 |
AS REQUIRED |
CUSTOM-11D |
PLATEN |
||
|
10" |
VHS-10, VHS400 |
1 |
5000W |
208V |
NOT LISTED |
5021-12D |
PLATEN |
|
10" |
VHS-10, VHS400 |
1 |
5000W |
240V |
NOT LISTED |
5024-12D |
PLATEN |
|
10" |
VHS-10, VHS400 |
1 |
5000W |
480V |
NOT LISTED |
5048-12D |
PLATEN |
|
10" |
VHS-10, VHS400 |
1 |
4400W |
208V |
0181-6473-10-140 (x2) |
4421-12D |
PLATEN |
|
10" |
VHS-10, VHS400 |
1 |
4400W |
240V |
0181-6473-10-150 (x2) |
4424-12D |
PLATEN |
|
10" |
VHS-10, VHS400 |
1 |
4400W |
480V |
0181-6473-10-170 (x2) |
4448-12D |
PLATEN |
|
10" |
VARIOUS |
1 |
AS REQUIRED |
CUSTOM 12D |
PLATEN |
||
|
16" |
HS-16 |
3 |
3200W |
240V |
NOT LISTED |
3224-8R |
PLATEN |
|
16" |
HS-16 |
3 |
3200W |
480V |
NOT LISTED |
3248-8R |
PLATEN |
|
16" |
HS-16 |
3 |
2700W |
240V |
0181-6473-16-035 |
2724-8R |
PLATEN |
|
16" |
HS-16 |
3 |
2700W |
480V |
0181-6473-16-045 |
2748-8R |
PLATEN |
|
16" |
VARIOUS |
3 |
AS REQUIRED |
CUSTOM 8R |
PLATEN |
||
|
20" |
HS-20 |
6 |
2400W |
240V |
NOT LISTED |
2424-10R |
PLATEN |
|
20" |
HS-20 |
6 |
2400W |
480V |
NOT LISTED |
2448-10R |
PLATEN |
|
20" |
HS-20 |
6 |
2000W |
240V |
0181-6473-20-060 |
2024-10R |
PLATEN |
|
20" |
HS-20 |
6 |
2000W |
480V |
0181-6473-20-070 |
2048-10R |
PLATEN |
|
20" |
HS-20 |
6 |
AS REQUIRED |
CUSTOM 10R |
PLATEN |
||
|
32" |
HS-32 |
6 |
4000W |
240V |
0181-6473-32-075 |
4024-14R |
PLATEN |
|
32" |
HS-32 |
6 |
4000W |
480V |
0181-6473-32-075 |
4048-14R |
PLATEN |
|
32" |
VARIOUS |
6 |
AS REQUIRED |
CUSTOM 14R |
PLATEN |
||
|
35" |
NHS-35 |
6 |
4000W |
240V |
0181-6472-35-248 |
4024-16/8R |
PLATEN |
|
35" |
NHS-35 |
6 |
4000W |
480V |
0181-6472-35-248 |
4048-16/8R |
PLATEN |
|
35" |
VARIOUS |
6 |
AS REQUIRED |
CUSTOM16/8R |
PLATEN
|
||
| eater Replacement Guide: Leybold Vacuum Diffusion Pumps | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
LEYBOLD
PART NO. |
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
10"
|
DIP 3 000
|
2
|
1250W
|
230V
|
200 05 457
|
D9C200-2762
|
CARTRIDGE
|
|
16"
|
DIP 8 000
|
6
|
800W
|
230V
|
200 05 458
|
D9C200-2761
|
CARTRIDGE
|
|
20"
|
DIP 12 000
|
9
|
800W
|
230V
|
200 05 458
|
D9C200-2761
|
CARTRIDGE
|
|
26"
|
DIP 20 000
|
12
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
|
32"
|
DIP 30 000
|
18
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
|
39"
|
DIP 50 000
|
24
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
| Heater Replacement Guide: EDWARDS HIGH VACUUM | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
EDWARDS HEATER NO.
|
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
4"
|
SI100
|
1
|
250W
|
120V
|
D5C067-2563
|
CARTRIDGE
|
|
|
4"
|
E04
|
1
|
850W
|
120V
|
H017-00-140
|
8/512-4D
|
PLATEN
|
|
4"
|
E04
|
1
|
850W
|
240V
|
H017-00-137
|
8/524-4D
|
PLATEN
|
|
6"
|
E06
|
1
|
1350W
|
120V
|
H017-00-59 & 102
|
1412-4/9D
|
PLATEN
|
|
6"
|
E06
|
1
|
1350W
|
240V
|
H017-00-54 & 113
|
1424-4/9D
|
PLATEN
|
|
9"
|
E09
|
1
|
2250W
|
120V
|
H017-00-161 & 132
|
2312-6/9D
|
PLATEN
|
|
9"
|
E09
|
1
|
2250W
|
240V
|
H017-00-158 & 137
|
2324-6/9D
|
PLATEN
|
|
10"
|
HT10
|
3
|
1700W
|
220V
|
26906-016
|
1722-6DE
|
PLATEN
|
|
10"
|
HT10
|
3
|
1700W
|
460V
|
26906-013
|
1746-6DE
|
PLATEN
|
|
12"
|
E012
|
3
|
1600W
|
120V
|
H017-00-181 & 102
|
1612-6E
|
PLATEN
|
|
12"
|
E012
|
3
|
1600W
|
240V
|
H017-00-179 & 113
|
1624-6E
|
PLATEN
|
|
16"
|
HT16
|
6
|
1500W
|
220V
|
26906-023
|
1522-6DE
|
PLATEN
|
|
16"
|
HT16
|
6
|
1500W
|
460V
|
26906-019
|
1546-6DE
|
PLATEN
|
|
18"
|
18B4
|
3
|
2000W
|
220V
|
26906-026
|
2022-6DE
|
PLATEN
|
|
18"
|
18B4
|
3
|
2000W
|
460V
|
26906-030
|
2046-6DE
|
PLATEN
|
|
20"
|
HT20
|
6
|
2100W
|
220V
|
26906-033
|
2122-10RE
|
PLATEN
|
|
20"
|
HT20
|
6
|
2100W
|
460V
|
26906-037
|
2146-10RE
|
PLATEN
|
| Heater Replacement Guide: VEECO Vacuum Diffusion Pumps | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
VEECO
HEATER NO. |
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
3"
|
300 Series
|
1
|
350W
|
115V
|
1180-030-00
|
3/512-3/3D
|
PLATEN
|
|
6"
|
7700 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
|
6"
|
7760 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
|
10"
|
747 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
[/vc_column_text][/vc_column][/vc_row][vc_row][vc_column width="1/1"][vc_column_text]
| Heater Replacement Guide: CVC Products | |||||||
|
PUMP
SIZE |
PUMP
MODEL |
Heaters
per Pump |
Electrical Rating
|
CVC PRODUCTS
PART NO. |
DALTON
PART NO. |
HEATER
TYPE |
|
|
WATTS
|
VOLTS
|
||||||
|
2"
|
PMC-2
|
1
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
2"
|
PMC-2
|
1
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
2"
|
PMC-2
|
1
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
2"
|
KS-200
|
1
|
500W
|
115V
|
51832
|
W4C044-0115
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
6"
|
PVMS-10
|
1
|
2200W
|
230V
|
285801-2
|
2223-6/5D
|
PLATEN
|
|
10"
|
PMC-10
|
18
|
250W
|
208V
|
270819-0002
|
W3C034-0114
|
CARTRIDGE
|
|
10"
|
PMC-10
|
18
|
250W
|
230V
|
270819
|
W3C034-0112
|
CARTRIDGE
|
|
10"
|
PVMS-11, -12
|
1
|
5000W
|
230V
|
281463-1
|
5023-10/9D
|
PLATEN
|
|
10"
|
PVMS-11, -12
|
1
|
5000W
|
460V
|
281463-2
|
5046-10/9D
|
PLATEN
|
|
16"
|
PVM-16
|
6
|
1600W
|
230V
|
281760-2
|
1623-8/2R
|
PLATEN
|
|
20"
|
PVM-20
|
36
|
350W
|
115V
|
5507892-0001
|
3/512-2/9D
|
PLATEN
|
|
20"
|
PMC-20C
|
INNER
|
4310W
|
230V
|
269933-1
|
4323-12/3RI
|
RING
|
|
20"
|
PMC-20C
|
INNER
|
4310W
|
460V
|
269933-3/5
|
4346-12/3RI
|
RING
|
|
20"
|
PMC-20C
|
OUTER
|
6690W
|
230V
|
269933-2
|
6723-17/7RI
|
RING
|
|
20"
|
PMC-20C
|
OUTER
|
6690W
|
460V
|
269933-4/6
|
6746-17/7RI
|
RING
|
|
32"
|
PVM-32
|
30
|
750W
|
115V
|
279503-0001
|
7/512 -4/9D
|
PLATEN
|
|
32"
|
PVM-32
|
30
|
750W
|
230V
|
279503-0002
|
7/523 -4/9D
|
PLATEN
|
|
35", 48"
|
PMC-32C, -48C
|
INNER
|
8930W
|
230V
|
269217-5
|
8923-23/9RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
INNER
|
8930W
|
460V
|
269217-1/3
|
8946-23/9RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
OUTER
|
11350W
|
230V
|
269217-6
|
11423-29/8RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
OUTER
|
11350W
|
460V
|
269217-2/4
|
11446-29/8RI
|
RING
|
|
ALL SIZES
|
VARIOUS
|
ALL TYPE
|
AS REQUIRED
|
CUSTOM
|
ALL TYPES
|
||