Apex Vacuum

Mass Flow Meter- Aggressive Gases

Mass Flow Meters for Inert & Aggressive Gases

Vacuum(to 300 torr) and Pressure Applications

Can Your Mass Flow Meter Measure up to 130 Different Gases? We Can!

Apex Mass Flow Meters for vacuum and non-vacuum applications combine flexibility with great accuracy.  The Aprx Mass Flow Meter Aggressive Series provides not flow measurement for inert but an array of aggressive gases. These include many refrigerant gases used world-wide in refrigeration systems. Flexibility to choose from a list of up to 130 on-board gases, to choose your input and output voltage and the ability to use RS232 communications. The ability to control up to 26 Apex devices through one RS232 port, provides your set-up the ultimate in flexibility.

What Makes us Different?

  • 98 or more On-Board Interchangeable Gases
  • Addressable RS-232 Digital Control Capability
  • FlowVision Computer Control/GraphingSsoftware
  • Pinpoint Accuracy of 0.2% Full Scale plus 0.8% Direct Reading
  • High Accuracy Calibration Option 0.4% FS plus 0.4% Reading
  • 200 to 1 Turndown Ration from Full Scale Flow
  • Flow Ranges from 2000 SLPM to 0.5 SCCM
  • For end users, no power supply/display boxes needed
  • RS-232 with software available
  • High Tech, Low Cost

Options for Apex Mass Flow Meters

  • TFT Display (shown above) for low light conditions
  • High Accuracy Calibration available
  • Remote Display Options
  • ATEX designs available on request
  • Secondary outputs available
  • 4-20 mAmp control available


  • Vacuum Evaporation Coating
  • Vacuum Sputtering
  • Ion-Beam Deposition
  • E-Beam Coating Systems
  • Gas Mixing
  • High Temperature Furnace Gas Control
  • Membrane Testing
  • Fuel Cell Research
  • Environmental Air Sampling
  • Research Applications